IKo Jr.
Small footprint.
Big electroplating efficiency.
SUMMARY
IKo™ Jr. is a practical benchtop tool with the smallest footprint on the market capable of efficiently electroplating 4” wafers with just 1 gallon of solution.
Designed for fast electroplating of high-resolution interconnects and fine metallic features on wafers and substrates.
System Features
Contamination Resistant
IKo™ Jr. is fabricated with PVC and polypropylene and a minimum of metal parts to avoid potential contamination of electroplating solutions.
Reliable Parts and Easy Assembly
Metal features are stainless and titanium. All parts can be easily disassembled for maintenance.
The unit is made up of two sections:
1. Electroplating Section
Conveniently accessible while preparing wafers for plating.
2. Power Section
Rolls over the Electroplating Section for processing. IKo’s arrangement of wafer holder, reciprocating anode, reverse pulse rectifier and pump ensure surpassing performance:
- Wafer holder, ergonomically designed for easy processing and handling. IKo™ can accommodate various wafer sizes. A full-circle, elastic electric contact provides uniform current distribution. Result: uniform thickness features across the wafer.
- Reciprocating anode, a proprietary feature that provides an efficient exchange of matter and uniform electric field distribution.
- Programmable Reverse-pulse Rectifier, contributes to equipment versatility. Reverse-pulse current during processing efficiently controls plating thickness distribution along the Z-axis.
- Fan-out Pump with constant filtration (regardless of fine filter medium). Provides a constant flow of high-quality bulk solution.
TECHNICAL SPECIFICATIONS
input power: |
220/120 VAC =/-10%, 50-60 Hz, 5/10A |
wafer size: |
2cm2 to 4″ |
metals plated: |
Cu, Ni, Pd, Au, Sn, Pb, Pt, Fe, Ag, Permalloy, Sn/Pb, Pd/Ni and others |
current DC and pulse avg: |
0.1A, 1.0A and 3.0A |
current peak: |
0.3A, 3.0A and 6.0A |
volts: |
0-10 |
control: |
sealed keypad for setup of optional controls and features |
on/off timing: |
4 digit 0.01 mS to 99 seconds |
programmable timer: |
4 digit realtime |
stability: |
+/- 1mA |
ripple: |
less 1% |
anode insoluble: |
FIBRoplate™ anode |
anode soluble: |
FIBRoplate™ titanium basket |
rec. frequency: |
0-2.7 Hz |
wafer holder: |
Full Circle gasket/contact, current collector |
filtration: |
Continuous-cartridge, 400 GPH with 1µ filtration |
venting: |
Fume exhaust attachment |
heater: |
Thermostat, 160F max., 550 Watt |
solution volume: |
1.06 Gal, 4 liters |
footprint: |
20″ wide, 20″ deep, 25″ high |
SUPPORT
ECSI provides operating and maintenance manual and initial technical assistance and training as specified bellow:
a. Free of charge training at the Buyer’s location for first two (2) days;
b. Travel, room and board expenses paid by the Buyer for the first 2 (two) days at the Buyer’s location;
c. At the prevailing hourly rate for any additional day beyond 2 (two) initial days.
CORE BENEFITS
Superior process control for sub-mil features
Low purchase and operating costs
Requires only 1 gallon of solution
Generates minimal environmental impact
Smallest plater footprint on the market (20"X20")
Handles various-sized wafers (2cm^2 to 4")
Extremely fast (~1µ per minute)
Uses off-the-shelf chemistries with minimal additives
Efficiently reuses chemical solution
Micro/macro uniformity less than 5% across the wafer
Easy to use and maintain
IKo Models
IKo Classic
The original. The IKo Classic is a practical benchtop tool with the smallest footprint for up to 8" wafers on the market.
IKo Jr.
Designed for fast electroplating of high-resolution interconnects and fine metallic features on wafers and substrates.
IKo Slim
The Slim version of IKo™ enables fitting up to 3 modules in a fume hood for multiple simultaneous sites within a single station.
IKo Station
Designed to be the all-in-one solution. Contains all accessories for processing wafers under one hood.
IKo Twin-Station
Double the power.
Simultaneous processes 2 wafers with 2 different electroplating applications under one hood.
MU-IKo Station
A self-contained multi-user complete plating system with three entirely separate IKo™ CLASSIC modules