IKo Station

The Complete

All-in-one System

 

SUMMARY

The IKo™ STATION™ is a self-contained, complete plating system for MEMS and NANO fabrication – wafer installation, cleaning, activation, DI rinsing and electroplating – ideal for a wide range, 2 cm2 to 8″ odd shape substrates and wafers.

Easily retrofitted to a cleanroom environment.

System Features

The IKo™ Station contains all accessories for processing wafers under one hood. The unit is fabricated with PVC and polypropylene and a minimum of metal parts to avoid potential contamination of electroplating solutions. Metal features are stainless and titanium. All parts can be easily disassembled for maintenance.

Dual power supply for precision reverse pulse plating or potentiostatic operation.

IKoStation’s arrangement of wafer holder, reciprocating anode, reverse pulse rectifier and pump ensure surpassing performance:

  • Wafer holders, ergonomically designed for easy processing and handling. A full-circle, elastic electric gasket/contact provides uniform current distribution. Result: uniform thickness features across the wafer without leaking solution to the back of the wafer. 
  • Reciprocating anode, a proprietary feature. Provides for an efficient exchange of matter and uniform electric field distribution. 
  • Reverse-pulse rectifier combined with the potentiostat, contribute to equipment versatility. Reverse-pulse current during processing efficiently controls plating thickness distribution along the Z-axis. Potentiostat enables electroplating at precisely-selected potential for specific MEMS and NANO structures. 
  • Fan-out pump with constant filtration (regardless of fine filter medium). Provides a constant flow of high-quality bulk solution.
    TECHNICAL SPECIFICATIONS
    input power: 220/120 VAC +/-10%, 50-60 Hz, single phase, 15/30 A
    hood size: 5’ x 3’ x 6’, construction material – Polypropylene
    wafer size: 2cm2 to 8″
    metals plated: Cu, Ni, Pd, Au, Sn, Pb, Pt, Fe, Ag, Permalloy, Sn/Pb, Pd/Ni and others
     

     

    Reverse Pulse Power Supply

    current DC/avg. max: 0.1 A, 1 A, 3 A, 5 A, 10 A
    current peak: 0.3 A, 3 A, 6 A,10 A, 20 A
    volts: 0-10 V (higher voltages available)
    on/off timing: upt to 5,000 Hz
    programmable timer: 4 digit realtime
    stability: +/- 1 mA
    ripple: 1%
     

     

    Potentiostat/Galvanostat:

    potentiostat: 3 electrode system
    current DC max: 1 A
    ref. electrode: Ag/AgCl or calomel
      Luggin capillary attachment
     

     

    Electroplating Section

    solution volume: 2.1 Gal, 8 liters
    anode insoluble: FIBRoplate™ anode
    anode soluble: FIBRoplate™ titanium basket
    wafer holder:

    2 cm2 to  8″, full circle collector

     

     

    Accessories

    rinse tank: 10″ x 12″ x 12″, cascade flow
    conditioning tank: 10″ x 10″ x 12″, two sections
    add’l feature: Bench-top pH meter
    N2/DI: Air/Nitrogen gun and DI water spray handy for wafer processing
    SUPPORT

    ECSI provides operating and maintenance manual and initial technical assistance and training as specified bellow:

    a. Free of charge training at the Buyer’s location for first two (2) days;

    b. Travel, room and board expenses paid by the Buyer for the first 2 (two) days at the Buyer’s location;

    c. At the prevailing hourly rate for any additional day beyond 2 (two) initial days.

    Click here to submit a Support Request

    CORE BENEFITS

    Superior process control for sub-mil features

    Low purchase and operating costs

    Handles various-sized wafers (2cm^2 to 8")

    Identical hydrodynamics for all sizes if needed

    Wafer cleaning and plating preparation under the same hood

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    Extremely fast (~1µ per minute)

    Uses off-the-shelf chemistries with minimal additives

    Efficiently reuses chemical solution

    Micro/macro uniformity less than 5% across the wafer

    Easy to use and maintain

    IKo Models

    IKo Classic

    The original. The IKo Classic is a practical benchtop tool with the smallest footprint for up to 8" wafers on the market.

    IKo Jr.

    Designed for fast electroplating of high-resolution interconnects and fine metallic features on wafers and substrates.

    IKo Slim

    The Slim version of IKo™ enables fitting up to 3 modules in a fume hood for multiple simultaneous sites within a single station.

    IKo Station

    Designed to be the all-in-one solution. Contains all accessories for processing wafers under one hood. 

    IKo Twin-Station

    Double the power.
    Simultaneous processes 2 wafers with 2 different electroplating applications under one hood. 

    MU-IKo Station

    A self-contained multi-user complete plating system with three entirely separate IKo™ CLASSIC modules

    Ready to Invest In Your R&D?